3.27.1.20191218 EZ-EDS版本生成的电子数据表设备网美元电子数据表电子数据表生成的海温EDS编辑器使用美元版权(C) 1998 s技术公司。[文件]DescText =“STEC数字Mass-Frow-Controller EDS文件”;CreateDate = 05-16-2022;CreateTime = 11:26:52;ModDate = 05-16-2022;ModTime = 14:38:32;修订= 10.0;(设备)VendCode = 162;VendName = " HORIBA STEC Inc .”;ProdType = 26;ProdTypeStr =“质量流量控制器”; ProdCode = 1000; MajRev = 1; MinRev = 2; ProdName = "LF-F004M-AA"; [IO_Info] Default = 0x0001; PollInfo = 0x0001, 2, 1; Input1 = 2, 0, 0x0001, "Flow", 6, "20 04 24 01 30 03", ""; Input2 = 3, 0, 0x0001, "Status,Flow", 6, "20 04 24 02 30 03", "STEC's Default Input."; Input3 = 5, 0, 0x0001, "Status,Flow,Valve", 6, "20 04 24 03 30 03", ""; Input4 = 5, 0, 0x0001, "Status,Flow,Setpoint", 6, "20 04 24 04 30 03", ""; Input5 = 7, 0, 0x0001, "Status,Flow,Setpoint,Valve", 6, "20 04 24 05 30 03", ""; Input6 = 8, 0, 0x0001, "Stat,Flow,Setpoint,Override,Valve", 6, "20 04 24 06 30 03", ""; Input7 = 1, 0, 0x0001, "Status", 6, "20 04 24 09 30 03", ""; Input8 = 7, 0, 0x0001, "Exception Detail Alarm", 6, "20 04 24 0A 30 03", ""; Input9 = 7, 0, 0x0001, "Exception Detail Warning", 6, "20 04 24 0B 30 03", ""; Input10 = 14, 0, 0x0001, "Exception Detail Alarm / Warning", 6, "20 04 24 0C 30 03", "Exception Detail Alarm and Warning"; Input11 = 4, 0, 0x0001, "FP-Flow", 6, "20 04 24 0D 30 03", ""; Input12 = 5, 0, 0x0001, "Status,FP-Flow", 6, "20 04 24 0E 30 03", ""; Input13 = 9, 0, 0x0001, "Status,FP-Flow,FP-Valve", 6, "20 04 24 0F 30 03", ""; Input14 = 9, 0, 0x0001, "Status,FP-Flow,FP-Setpoint", 6, "20 04 24 10 30 03", ""; Input15 = 13, 0, 0x0001, "Status,FP-Flow,FP-Setpoint,FP-Valve", 6, "20 04 24 11 30 03", ""; Input16 = 14, 0, 0x0001, "Stat,FP-Flow,FP-Setpoint,Override,FP-Valve", 6, "20 04 24 12 30 03", ""; Output1 = 2, 0, 0x0001, "Setpoint", 6, "20 04 24 07 30 03", "STEC's Default Output."; Output2 = 3, 0, 0x0001, "Override,Setpoint", 6, "20 04 24 08 30 03", ""; Output3 = 4, 0, 0x0001, "FP-Setpoint", 6, "20 04 24 13 30 03", ""; Output4 = 5, 0, 0x0001, "Override,FP-Setpoint", 6, "20 04 24 14 30 03", "";