$EZ-EDS版本3.0生成电子数据表DesctextCreateDate=11-142022创建时间=11:05:02ModDate=11142022ModTime=11:05:03修订版=1.2VendCode=162VendName=HORIBASTEC公司ProdType=39ProdTypeStr=Mass流控器增强ProdCode=700MajRev=1MinRev=1ProdName=D704Catalog=N/A默认值=0x0001PollInfo=0x00012Input1 = 2, 0, 0x0001, "Flow", 6, "20 04 24 01 30 03", "Flow"!Input2 = 3, 0, 0x0001, "Status and Flow", 6, "20 04 24 02 30 03", "Status and Flow"!Input3 = 5, 0, 0x0001, "Status, Flow and Valve", 6, "20 04 24 03 30 03", "Status, Flow and Valve"!Input4 = 5, 0, 0x0001, "Status, Flow and Setpoint", 6, "20 04 24 04 30 03", "Status, Flow and Setpoint"!Input5 = 7, 0, 0x0001, "Status, Flow, Setpoint and Valve", 6, "20 04 24 05 30 03", "Status, Flow, Setpoint and Valve"!Input6 = 8, 0, 0x0001, "Status, Flow, Setpoint, Override and Valve", 6, "20 04 24 08 30 03", "Status, Flow, Setpoint, Override and Valve"!Input7 = 1, 0, 0x0001, "Status", 6, "20 04 24 09 30 03", "Status"!Input8 = 4, 0, 0x0001, "FP-Flow", 6, "20 04 24 0D 30 03", "FP-Flow"!Input9 = 5, 0, 0x0001, "Status and FP-Flow", 6, "20 04 24 0E 30 03", "Status and FP-Flow"!Input10 = 9, 0, 0x0001, "Status, FP-Flow and FP-Valve", 6, "20 04 24 0F 30 03", "Status, FP-Flow and FP-Valve"!Input11 = 9, 0, 0x0001, "Status, FP-Flow and FP-Setpoint", 6, "20 04 24 10 30 03", "Status, FP-Flow and FP-Setpoint"!Input12 = 13, 0, 0x0001, "Status, FP-Flow, FP-Setpoint and FP-Valve", 6, "20 04 24 11 30 03", "Status, FP-Flow, FP-Setpoint and FP-Valve"!Input13 = 14, 0, 0x0001, "Status, FP-Flow, FP-Setpoint, Override and FP-Valve", 6, "20 04 24 12 30 03", "Status, FP-Flow, FP-Setpoint, Override and FP-Valve"!Input14 = 7, 0, 0x0001, "Status, Flow, Pressure and Temperature", 6, "20 04 24 15 30 03", "Status, Flow, Pressure and Temperature"!Input15 = 9, 0, 0x0001, "Status, Flow, Valve, Pressure and Temperature", 6, "20 04 24 16 30 03", "Status, Flow, Valve, Pressure and Temperature"!Input16 = 13, 0, 0x0001, "Status, FP-Flow, FP-Pressure and FP-Temperature", 6, "20 04 24 17 30 03", "Status, FP-Flow, FP-Pressure and FP-Temperature"!Input17 = 17, 0, 0x0001, "Status, FP-Flow, FP-Valve, FP-Pressure and FP-Temperature", 6, "20 04 24 18 30 03", "Status, FP-Flow, FP-Valve, FP-Pressure and FP-Temperature"!Input18 = 17, 0, 0x0001, "Status, Exception Detail Alarm and Exception Detail Warning", 6, "20 04 24 19 30 03", "Status, Exception Detail Alarm and Exception Detail Warning"!Input19 = 7, 0, 0x0001, "Status, Flow, Pressure 1 and Pressure 2", 6, "20 04 24 64 30 03", "Status Flow, Pressure 1 and Pressure 2"!Input20 = 11, 0, 0x0001, "Status, Flow, Pressure, Temperature, Pressure 1 and Pressure 2", 6, "20 04 24 65 30 03", "Status, Flow, Pressure, Temperature, Pressure 1 and Pressure 2"!Input21 = 13, 0, 0x0001, "Status, Flow, Valve, Pressure, Temperature, Pressure 1 and Pressure 2", 6, "20 04 24 66 30 03", "Status, Flow, Valve, Pressure, Temperature, Pressure 1 and Pressure 2"!Input22 = 13, 0, 0x0001, "Status, FP-Flow, FP-Pressure 1 and FP-Pressure 2", 6, "20 04 24 67 30 03", "Status, FP-Flow, FP-Pressure 1 and FP-Pressure 2"!Input23 = 21, 0, 0x0001, "Status, FP-Flow, FP-Pressure, FP-Temperature, FP-Pressure 1 and FP-Pressure 2", 6, "20 04 24 68 30 03", "Status, FP-Flow, FP-Pressure, FP-Temperature, FP-Pressure 1 and FP-Pressure 2"!Input24 = 25, 0, 0x0001, "Status, FP-Flow, FP-Valve, FP-Pressure, FP-Temperature, FP-Pressure 1 and FP-Pressure 2", 6, "20 04 24 69 30 03", "Status, FP-Flow, FP-Valve, FP-Pressure, FP-Temperature, FP-Pressure 1 and FP-Pressure 2"!Input25 = 12, 0, 0x0001, "Status, Flow, Setpoint, Override, Valve, Pressure and Temperature", 6, "20 04 24 78 30 03", "Status, Flow, Setpoint, Override, Valve, Pressure and Temperature"!Input26 = 14, 0, 0x0001, "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature and G-LIFE Error", 6, "20 04 24 79 30 03", "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature and G-LIFE"!Input27 = 16, 0, 0x0001, "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature, Pressure 1 and Pressure 2", 6, "20 04 24 7A 30 03", "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature, Pressure 1 and Pressure 2"!Input28 = 18, 0, 0x0001, "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature, Pressure 1, Pressure 2 and G-LIFE Error", 6, "20 04 24 7B 30 03", "Status, Flow, Setpoint, Override, Valve, Pressure, Temperature, Pressure 1, Pressure 2 and G-LIFE Error"!Output1 = 2, 0, 0x0001, "Setpoint", 6, "20 04 24 07 30 03", "Setpoint"!Output2 = 3, 0, 0x0001, "Override and Setpoint", 6, "20 04 24 08 30 03", "Override and Setpoint"!Output3 = 4, 0, 0x0001, "FP-Setpoint", 6, "20 04 24 13 30 03", "FP-Setpoint"!Output4 = 5, 0, 0x0001, "Override and FP-Setpoint", 6, "20 04 24 14 30 03", "Override and FP-Setpoint"!$请联系HORIBASTEC,如果你有任何问题